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Photolithography Overview for MEMS
This is a short overview of the photolithography processes used to fabricate microsized devices. This presentation was produced by the Southwest Center for Microsystems Education (SCME). A supporting Photolithography Overview Learning Module can be downloaded from SCME's website (http://scmenm.org), Educational Materials.
![[Photolithography Part6] Photomask (1 of 2)](https://i.ytimg.com/vi/H1hLYgdTwEY/mqdefault.jpg)
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