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How Semiconductor DRAM Went 3D

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Note: I should clarify that the first Intel 1103 was not a Dennard 1transistor design. It had 3 transistors, and eventually hit the 1transistor Dennard design in the 16kilobit generation.

A second clarification: Hat tip to Jonathan M., who pointed out to me that DRAM soft errors are now found to be the result of radioactive elements in the packaging, not cosmic rays. Cosmic rays seem cooler though imo, https://ieeexplore.ieee.org/document/...

Bonus points if you can tell me how the semiindustry learned tantalum deposition.

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