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Etching Silicon with Plasma - Reactive Ion Etching (RIE)
/ szeloof
OUTLINE:
0:00 intro
1:10 chamber overview
2:26 etch demo
3:58 demo results
5:40 endpoint detection
7:37 quirks, subtleties, safety
10:39 construction
Music is shanghai by king gizzard and the lizard wizard
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